The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 1986
Filed:
Jan. 18, 1985
Hitachi, Ltd., Tokyo, JP;
Abstract
A guiding apparatus having a slider supported in a floating manner above a base by means of hydrostatic bearings, a pressurized fluid supplying means for supplying the hydrostatic bearings with a pressurized fluid, and detecting means for detecting the displacement of the slider with respect to a designated coordinate. The pressure of the pressurized fluid from the pressurized fluid supplying means is adjusted in accordance with a signal which is obtained as a result of the comparison between the value representing the reference position of the slider with respect to the base and the value actually measured by the detecting means, thereby adjusting the sizes of the gaps for forming hydrostatic fluid film for the hydrostatic bearings, thereby to correct the position of the slider to the designated position. With this arrangement, the absolute position of the slider is precisely determined without being affected by disturbance factors such as the precision of assembling of the base and the slider. This guiding apparatus is suited to use as precision positioning apparatus such as that used in the assembly of photomodule elements.