The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 1986
Filed:
Jun. 13, 1985
Joel Hartmann, Claix, FR;
Commissariat a l'Energie Atomique, Paris, FR;
Abstract
This process consists of depositing a first conductive coating on the complete circuit, depositing on said coating a filling material used for filling the contact hole, the surface of said material being substantially planar, carrying out an anisotropic etching of said filling material so as to expose those parts of the first conductive coating located outside the contact hole and only retaining that part of said filling material which fills the contact hole, depositing on the structure obtained a second conductive coating in which the interconnection line will be formed, producing in the second conductive coating a resin mask used for defining the dimensions of the line, eliminating those parts of the second and first conductive coatings which are free from the mask and eliminating the mask.