The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 1986
Filed:
Jul. 24, 1984
Applicant:
Inventors:
James M Gee, Albuquerque, NM (US);
Philip J Hargis, Jr, Albuquerque, NM (US);
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ; C03C / ; C23F / ;
U.S. Cl.
CPC ...
156643 ; 118 501 ; 118620 ; 118728 ; 156345 ; 156635 ; 156646 ; 156654 ; 2041923 ; 204298 ; 2191 / ; 2191 / ; 427 38 ; 427 531 ; 427 541 ;
Abstract
A process for the modification of substrate surfaces is described, wherein etching or deposition at a surface occurs only in the presence of both reactive species and a directed beam of coherent light.