The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 1986
Filed:
Jul. 25, 1985
Applicant:
Inventors:
Gerhard Hessberger, Karlstein, DE;
Michael Scherer, Rodenbach, DE;
Assignee:
Hans Zapfe, Rodgau-3, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
204298 ; 2041921 ;
Abstract
Sputtering system for cathode sputtering apparatus, having a cathode base body with a target of the material to be sputtered. In the marginal part of the target an anode is disposed which is provided with at least one groove. For the solution of the problem of obtaining stable operating conditions in the lengthy coating of substrates with insulating materials and of drawing a high portion of the cathode current to the anode for a long period of time, the at least one groove opens, in accordance with the invention, on a side of the anode that is not in line of sight with the target.