The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 21, 1986

Filed:

Feb. 17, 1984
Applicant:
Inventors:

Mark A Kuck, Upper Montclair, NJ (US);

Susan W Gersten, Elmsford, NY (US);

Assignee:

Stauffer Chemical Company, Westport, CT (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
2329 / ; 2329 / ; 423322 ;
Abstract

Liquid white phosphorus is distilled from red phosphorus in vacuo at 480.degree.-490.degree. C. The vapor is transferred in a conduit maintained at 250.degree. C. and condensed into liquid white phosphorus at room temperature. The liquid white phosphorus is then filtered to eliminate any condensed red phosphorus. The clear, colorless phosphorus produced may be utilized as a source of P.sub.4 species for chemical vapor deposition, sputtering, vacuum deposition, and molecular beam deposition of phosphorus, polyphosphide, and other phosphorus compound films for semiconductor and other applications including insulation and passivation.


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