The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 1986
Filed:
Mar. 08, 1985
Applicant:
Inventors:
Paul M Zavracky, Norwood, MA (US);
Stephen D Senturia, Boston, MA (US);
Richard H Morrison, Jr, Taunton, MA (US);
Assignee:
The Foxboro Company, Foxboro, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01L / ; H01L / ; B44C / ; C23F / ;
U.S. Cl.
CPC ...
73704 ; 73715 ; 73754 ; 156628 ; 156630 ; 156633 ; 156634 ; 156647 ; 156656 ; 156657 ; 156651 ; 156662 ;
Abstract
A microminiature resonant hollow beam sensor is manufactured by micromachining and microfabrication techniques. Specifically, a sensor is formed by etching troughs in a pair of silicon substrates, joining the substrates face-to-face, and etching away unwanted material to free the resonant hollow beam sensors.