The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 1986
Filed:
Jul. 11, 1984
Masuo Tanno, Osaka, JP;
Yuichiro Yamada, Neyagawa, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
According to the present invention, there is used a usual reactive ion etching apparatus (as shown in FIG. 1) including a vacuum vessel (1), exhaust means (2), etching gas supply means (4), plasma generating electrodes (6) and high frequency power supply (7). Substance having a catalytic action (8) is inserted in the etching gas supply means (4), by which the present invention is characterized. According to the present invention, a catalyst having an action of dehydrogenation, dehydrohalogenation or dehalogenation dependent on the molecular structure of a halogenized gas to be used, is inserted in the etching gas supply means in the path thereof, thereby to improve the etching speed and the etching selectively without the use of explosive or injurious gases such as hydrogen, chlorine, hydrogen chloride or hydrogen fluoride as additive gases.