The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 1986

Filed:

Jan. 14, 1985
Applicant:
Inventor:

Theodore C Rich, Berkeley Heights, NJ (US);

Assignee:

Richland Glass Company, Inc., Richland, NJ (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ; G02B / ;
U.S. Cl.
CPC ...
250216 ; 350501 ; 350172 ;
Abstract

An optical system transmits and reflects a laser beam along a common optical path between a laser generator and the target area on a workpiece. Illuminating light is transmitted along a portion of the optical path to the workpiece and is reflected therefrom to form an image of the target area projected onto a display screen. The reflected laser beam is focused at a detection point to monitor etch rate while the illuminating light is reflected adjacent thereto from the optical path to provide a visual indication of the laser beam locations on the workpiece corresponding to the image being simultaneously displayed.


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