The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 1986
Filed:
Dec. 20, 1984
Alan L Harrington, Hawthorne, CA (US);
Vladimir Rodov, Redondo Beach, CA (US);
TRW Inc., Redondo Beach, CA (US);
Abstract
A method for the fabrication of semiconductor devices, particularly bipolar silicon devices, having ultra-shallow but relatively large junctions. The process is characterized by the use of relatively low temperatures for critical oxidations steps and for ion-implantation steps. The region implantations are performed at low temperature and the necessary annealing steps are deferred until all of the regions are in place. Then a single pulse-annealing step is employed, to minimize further movement of the region junctions. Processing-induced defects are thereby reduced to a minimum, and the process can be used to produce ultra-shallow junctions in a reliable and repeatable manner.