The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 12, 1986

Filed:

Apr. 01, 1985
Applicant:
Inventor:

Matthew A Bonn, Saratoga, CA (US);

Assignee:

Advanced Micro Devices, Inc., Sunnyvale, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
2957 / ; 29571 ; 2957 / ; 148-15 ; 148187 ; 148D / ; 357 42 ; 357 43 ; 357 91 ;
Abstract

An improved method is disclosed for isolating active devices in an integrated circuit structure containing both CMOS and bipolar devices to simultaneously form isolation regions to separate CMOS channels from adjacent channels or bipolar devices as well as to separate adjacent bipolar devices from one another. The improved method of isolation also results in the simultaneous formation of a retrograde p-well for the n-channel device. The improved method comprises implanting, into a substrate having field oxide portions previously grown thereon, impurities capable of forming one or more isolation regions, between the active devices, at an energy level sufficiently high to permit penetration of the impurities through the field oxide.


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