The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 1986
Filed:
Jan. 12, 1984
William R Knowles, Newmarket, GB;
Ian A Cruttwell, Great Chishall, Nr. Royston, GB;
Cambridge Instruments Limited, Cambridge, GB;
Abstract
A scanning electron microscope arrangement has an integral image store connected to receive signals from an electron collector which collects the secondary electrons emitted from the specimen surface in response to impingement by the electron beam. The latter is scanned over the specimen by scanning coils driven by a scan generator. A cathode ray tube is provided which has its separate scan generator and responds to the previously stored signals as they are read out from the store under control of a control unit. Because the arrangement has an integral store, the beam scanning rates of the electron beam and the CRT beam can be entirely independent. The scan generator for the electron beam may therefore have a relatively low rate and therefore a low power rating. The CRT can be a standard type and does not need to be high persistance. The signal to noise ratio of the signals in the store can be increased by repeating the scan of the specimen before reading out the signals.