The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 1986
Filed:
Jun. 21, 1984
Alan R Becker, Coopersburg, PA (US);
Richard A McCorkle, Allentown, PA (US);
Robert A Miller, Easton, PA (US);
Gary J Plessl, Allentown, PA (US);
AT&T Technologies, Inc., Berkeley Heights, NJ (US);
Abstract
Apparatus (11), which includes two adjacent wafer treating facilities (21 and 22), features an overhead positioning mechanism (20), the operation of which is controlled by a control module (48) to handle articles, such as semiconductor wafers (16), in a plurality of sequential plating operations. The vertical movement of a manipulator extension (46) is controlled with a relatively greater degree of precision to protect the wafers from becoming damaged. In the horizontal direction, a traveling frame (106) steadies a lead screw (59) spanning an extended distance between the two facilities (21 and 22) to support a precise movement of the manipulator extension (46) with respect to both of the facilities.