The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 1986
Filed:
May. 07, 1985
Robert H Munnig Schmidt, Drachten, NL;
U.S. Philips Corporation, New York, NY (US);
Abstract
A device for exchanging masks used in the photolithographic treatment of semiconductor devices comprises a rotatable disk (1), on which supporting places for a number of masks (5,6) are present, which disk can be arranged by rotation in a position in which one of the mask supporting places is in a position desired for photolithographic treatment, said position can be determined by means of a detector (19), which, after a position-servo-system has been switched into circuit, supplies a detector signal to this system and thus controls the adjustment of the disk. For rotation of the disk (1), two electromagnetic movement systems (7,13; 8,14) are present each comprising a magnet and a coil, wherein either the pair of magnets or the pair of coils is fixedly arranged and the other pair is provided on the turntable and is rotatable therewith, a current connection for the coils being present to supply a constant current to the coils.