The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 1986
Filed:
Oct. 09, 1984
Applicant:
Inventors:
Jacques S Mercier, Kanata, CA;
Vu Q Ho, Ottawa, CA;
Assignee:
Northern Telecom Limited, Montreal, CA;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; C03C / ; C03C / ;
U.S. Cl.
CPC ...
156643 ; 29591 ; 156646 ; 156653 ; 156657 ; 2041 / ; 357 71 ; 427 89 ; 427 93 ;
Abstract
Particularly for use in multilevel metallization structures in which the underlying topography consists of fine and sharply contoured conductor lines produced by dry etching, conformal or near planar dielectric coatings are produced by depositing a dielectric layer to a thickness over the conductor of at least three times the conductor thickness. The dielectric is then anisotropically etched back to a thickness comparable with that of the underlying conductor. By this method a smooth dielectric top surface can be obtained without the requirement for multiple processing steps characterizing alternative planarizing techniques.