The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 1986
Filed:
Dec. 24, 1984
Applicant:
Inventors:
Takashi Tanaka, Yamagata, JP;
Shigeru Abe, Yamagata, JP;
Assignee:
Toshiba Ceramics Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118715 ; 427 86 ; 427 93 ;
Abstract
A silicon carbide process tube which can be used for heat-treating a semiconductor device in a diffusion step, oxidation step and etc.. This silicon carbide process tube is characterized in that the inner surface of the process tube has a surface coarseness of 150 .mu.m or less.