The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 1986
Filed:
Dec. 31, 1984
Applicant:
Inventors:
Assignee:
Fuji Photo Optical Co., Ltd., Saitama, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25B / ;
U.S. Cl.
CPC ...
269 21 ; 269 22 ;
Abstract
A device for attraction holding a measurement object in an interferometer comprises a holding surface having holes and an air chamber communicating with the holes through suction passages formed between the holding surface and air chamber so as to attract and hold an object on the holding surface by exhausting the air from the air chamber. The air chamber is sealed by at least one flexible member which is deformed when an excessive negative pressure is established in the air chamber, so as to prevent distort or deformation of the holding surface, and hence the object held thereon.