The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 17, 1986

Filed:

Dec. 06, 1984
Applicant:
Inventor:

Shaun L McCarthy, Ann Arbor, MI (US);

Assignee:

Ford Motor Company, Dearborn, MI (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
73204 ;
Abstract

A mass airflow sensor includes a silicon substrate with integral, thin, elongated silicon members between openings through the silicon substrate. A silicon dioxide coating and a metal coating on the silicon member adapt it to function as a hot wire mass airflow sensor.


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