Coplanar and stripline probe card apparatus

Abstract

Coaxial cables each having a cylindrical electrically conductive outer shield and a central conductive wire insulated from the shield are conductively coupled through a connector to coplanar conductors on a dielectric substrate. The conductors converge toward an opening in the substrate. The coplanar conductors alternately are ground and signal conductors. Each coaxial cable shield is conductively coupled to two ground conductors and the cable wire is conductively coupled to the signal conductor between the two ground conductors. At the substrate opening the ground and signal conductors are conductively coupled to planar stripline waveguide ground and signal blades, respectively. Ground blades between the signal blades are a factor in controlling the signal blade impedance and provide isolation between the signal blades. Each blade is perpendicular to the substrate and has a pitch angle such that the blade extends through the opening below the substrate. A wire or needle probe is conductively coupled to the blade distal end. The needle end is adapted to contact a conductive pad on an IC (integrated circuit) chip. The coplanar conductors and stripline blades are configured to maintain substantially constant characteristic impedance in the signal conductors and their respective blades and to isolate signals in the signal conductors and blades from one another.