The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 1986
Filed:
Apr. 10, 1985
Applicant:
Inventors:
Simon Deleonibus, Grenoble, FR;
Guy Dubois, St. Etienne de Crossey, FR;
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; B44C / ; C03C / ; H01L / ;
U.S. Cl.
CPC ...
156644 ; 29580 ; 29591 ; 156652 ; 156656 ; 156657 ; 156662 ; 357 71 ; 427 88 ; 427 90 ;
Abstract
In order to form aluminum interconnections through a thick insulating layer in an integrated circuit without any attendant danger of rupture at the level of the contact openings in the insulating layer between the interconnection layer and the substrate, the contact openings are first filled with polycrystalline silicon or a metal having high covering power and deposited by chemical decomposition in gas phase, whereupon the aluminum is deposited by vacuum evaporation.