The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 03, 1986

Filed:

Nov. 30, 1984
Applicant:
Inventor:

Jose M Gallego, Ormskirk, GB;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ;
U.S. Cl.
CPC ...
118719 ; 118723 ; 118729 ; 118 501 ; 118733 ; 118726 ; 118500 ; 414217 ;
Abstract

Compact and versatile apparatus for deposition of multi-layer coatings on substrates at reduced pressure comprises at least 3 and preferably at least 4 evacuable deposition chambers, means for evacuating each of said deposition chambers and coating means in each of said deposition chambers for depositing a coating layer on a substrate; an evacuable transfer chamber with closable ports between said transfer chamber and each of said coating chambers for transfer of a substrate to be coated between said deposition chambers; means for evacuating said transfer chamber; and transfer means for transferring a substrate between said deposition chambers via the transfer chamber. The apparatus is especially useful for the production of photovoltaic cells in which the active layers are formed of amorphous silicon deposited from a glow discharge.


Find Patent Forward Citations

Gallego, Jose. (1986). Apparatus for the deposition of multi-layer coatings (U.S. Patent No. 4592306). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4592306

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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