The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 1986
Filed:
Jul. 30, 1981
Applicant:
Inventor:
Vernon C Milligan, Los Altos, CA (US);
Assignee:
Pacific Western Systems, Inc., Mountain View, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; G01R / ; B24B / ; B08B / ;
U.S. Cl.
CPC ...
3241 / ; 15-1 ; 51 / ; 5128 / ; 134-6 ; 3241 / ;
Abstract
In an automatic wafer prober, the prober steps through a certain predetermined sequence of die on the wafer. After a certain predetermined number of die have been probed, the prober automatically interrupts the probing sequence and steps the prober off of the wafer onto an abrasive element for scrubbing clean the probe tips. Thereafter, the prober returns to its predetermined probing sequence. The abrasive element is preferably fixidly secured to the wafer chuck. A flat of the abrasive element serves as an alignment flat for registration with a flat of the wafer.