The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 1986
Filed:
Dec. 31, 1984
Steven J Finnes, Rochester, MN (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An electron beam transversely scans a planar surface having a longitudinal structure projecting therefrom. Two Everhart-Thornley detectors are positioned on transversely opposite sides, respectively, of the structure. During a first scan, only one detector is turned ON to produce a first electric signal having a pronounced amplitude dip corresponding to the structure's bottom edge which is facing away from the ON detector. During the next scan, only the other detector is turned ON to produce a second electric signal having a pronounced amplitude dip corresponding to the structure's other bottom edge which is now facing away from the ON detector. The two signals are combined to produce a composite signal whose waveform comprises two enhanced and segmented dips corresponding precisely to the locations of the structure's two bottom edges.