The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 29, 1986

Filed:

Feb. 15, 1985
Applicant:
Inventor:

Kuniyoshi Tanaka, Yokohama, JP;

Assignee:

Kabushiki Kaisha Toshiba, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
310328 ;
Abstract

A precision moving mechanism can rotate a table continuously and precisely. A first drive disk is made of first and second movable sections and a resilient hinge connecting these sections. A first piezoelectric element has ends coupled to these sections, which can be attached to a first base by first and second members. A second drive disk is made of third and fourth movable sections and a resilient hinge connecting these sections. A second piezoelectric element has ends coupled to these sections, which can be attached to the second base by third and fourth members. The second and third sections are coupled to the second base and table, respectively. During the first period, the first member attaches the first section to the first base, the fourth member attaches the fourth section to the second base, and the first element expands, and the second element contracts, whereby the second section slightly rotates to rotate the table. During the second period, the second member 46 attaches the second section to the first base, the third member attaches the third section to the second base, the first element contracts and the second element expands, whereby the fourth section slightly rotates to rotate the table.


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