The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 29, 1986

Filed:

Sep. 25, 1984
Applicant:
Inventors:

Hideki Matsunaga, Yokohama, JP;

Naoyuki Hirate, Yokosuka, JP;

Akira Okada, Tokyo, JP;

Assignee:

Kabushiki Kaisha Toshiba, Kawasaki, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
73863 ; 7386321 ; 356 36 ; 422299 ;
Abstract

The resolution device for semiconductor films according to the present invention comprises a sealed container, a storage container installed in the sealed container for storing hydrofluoric acid to generate hydrogen fluoride gas, a semiconductor film supporter installed in the sealed container, and a receptacle of resolved solution installed at the bottom of the sealed container for receiving the resolved solution of the semiconductor films. The semiconductor films held by the film supporter are resolved by hydrogen fluoride gas which is generated from the storage container of hydrofluoric acid and has a low impurity content. The resolved solution is collected in the receptacle for resolved solution, and is supplied directly to the flameless atomic absorption spectrophotometer.


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