The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 1986
Filed:
Jan. 06, 1984
Carlo LaFiandra, New Canaan, CT (US);
Gregory P Hughes, Norwalk, CT (US);
The Perkin-Elmer Corporation, Norwalk, CT (US);
Abstract
The present invention is directed to a rotating anode x-ray source assembly which is particularly adapted for effecting high x-ray emission from a conventional x-ray source for use in replicating VLSI circuits, and comprises a rotatable anode target ring, cooling water flow channels dispose adjacent the target ring for cooling the target ring during operation, an E-beam directed to a spot on the target ring towards the periphery thereof, the cooling water flow channel being constructed and arranged so that on a transverse plane with respect to the axis of rotation all diametrically opposed points on any diameter have the same cooling water density, thereby dynamically balancing the anode under all thermal conditions.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile