The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 1986
Filed:
Mar. 30, 1984
Applicant:
Inventor:
Yoshiaki Okayama, Yamato, JP;
Assignee:
Nohmi Bosai Kogyo Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; G01N / ;
U.S. Cl.
CPC ...
338 34 ; 73 23 ; 4271263 ;
Abstract
A sensor for detecting low concentrations of silane gas in air and a process for making the sensor are disclosed. The sensor comprises a silane-sensitive element and a heater to heat the element to 200.degree.-400.degree. C. The element comprises an electrode-equipped alumina porcelain tube coated with a mixture of SnO.sub.2, SbOCl, and Pt. The tube is calcined in air or in an oxidized antimony atmosphere at 600.degree.-850.degree. C. and is exposed to a silane atmosphere at 150.degree.-850.degree. C. to stabilize its properties.