The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 1986
Filed:
Mar. 11, 1985
Edward H Phillips, Middletown, CA (US);
Eaton-Optimetrix, Inc., San Jose, CA (US);
Abstract
A projection lens and a source of illumination and exposure light are employed for projecting an image of a reticle onto a first reference mark or a semiconductive wafer, both of which are movably supported in the image plane of the projection lens. Optical apparatus, including an objective lens unit and an imaging lens, is provided for imaging light from the source of illumination and exposure light at the reticle and for reimaging reflected light from the semiconductive wafer at the objective lens unit. Additional optical apparatus, including a source of nonexposure light, is provided and is operable with the projection lens for imaging a second adjustable reference mark onto the first reference mark or the semiconductive wafer to facilitate use of the projection lens in aligning a semiconductive wafer covered with a photoresist opaque to exposure light.