The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 11, 1986

Filed:

Jun. 18, 1984
Applicant:
Inventors:

Bruce A Horwitz, Newton, MA (US);

Alan J MacGovern, Acton, MA (US);

Assignee:

Itek Corporation, Lexington, MA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356353 ; 356359 ;
Abstract

A wavefront sensor employs a novel DC shearing interferometer which produces four interferograms which are 90.degree. phase shifted with respect to each other. The incoming wavefront is replicated into two beams, a portion of each being reflected off of a beamsplitter and the remaining portion being transmitted therethrough, at first and second portions of the beamsplitter. After leaving the beamsplitter the transmitted and reflected beams are reflected back 180.degree. by a pair of retroreflectors, and directed at third and fourth portions of the beamsplitter. The retroreflectors are adjusted to produce four shearing interferograms and a quarter wave plate is positioned in the path of one of the beams to cause the four interferograms to have a 90.degree. phase shifted relationship with respect to each other. The interferograms are thereafter projected upon intensified self scanning diode arrays, which digitize the interference patterns for convenient processing by means of a four-bin algorithm, which in turn generates estimated phase data indicative of the shape of the wavefront in a given direction. The process may be duplicated to produce second measurements in an orthogonal direction, which enables the mapping of the wavefront in both X and Y. In contrast with A.C. shearing interferometers, the wavefront shapes of very brief plused beams of light may be measured.


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