The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 1986
Filed:
May. 17, 1984
Applicant:
Inventors:
James R Hunt, Westminster, CA (US);
Russell P Balent, Fountain Valley, CA (US);
Assignee:
The Fluorocarbon Company, Anaheim, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B / ; F26B / ; F27D / ;
U.S. Cl.
CPC ...
34242 ; 34133 ; 432242 ;
Abstract
In a rinser/dryer for carriers of semiconductor wafers, a rotatable frame containing the carrier is directly mounted to, and cantilevered from the drive motor. A container encloses the rotatable frame and carrier. A gas pressurized labyrinth seal separates the inside of the container from the drive motor to prevent contamination. A raised portion in the labyrinth seal, with gas inlets on each side of the raised portion, forms a pressure barrier inhibiting the passage of moisture and contaminates across the barrier.