The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 1985
Filed:
Jun. 07, 1983
Applicant:
Inventor:
Ties S Te Velde, Eindhoven, NL;
Assignee:
U.S. Philips Corporation, New York, NY (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
2957 / ; 29591 ; 156644 ; 156652 ; 156656 ;
Abstract
A self-registering method of manufacturing an air-(vacuum) -insulated crossing multilayer wiring system of large density is disclosed. Between the lowermost and uppermost wiring layers an intermediate layer is provided in which recesses are formed between the intermediate layer and the lowermost wiring layer. By means of said recesses the intermediate layer can be removed entirely at the area of the crossings during the etching process, while elsewhere portions of the intermediate layer remain as supporting parts or as connecting members.