The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 1985
Filed:
Sep. 12, 1983
Applicant:
Inventor:
William M Mularie, Stillwater, MN (US);
Assignee:
Vac-Tec Systems, Inc., Boulder, CO (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
2041 / ; 204298 ; 118 501 ; 118723 ; 427 37 ; 427 47 ;
Abstract
Apparatus and method for evaporation arc stabilization including a permeable target having a surface of material to be evaporated; circuitry for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over the target surface; a confinement ring contacting and surrounding the target surface, the ring being composed of a material such as boron nitride and a permeable ring surrounding the target for effecting substantially uniform evaporation of the permeable target material from the target surface.