The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 1985
Filed:
Jan. 23, 1984
Applicant:
Inventor:
Peter J Van Benschoten, Rancho Santa Fe, CA (US);
Assignee:
The Micromanipulator Microscope Company, Inc., Escondido, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
350531 ; 108143 ;
Abstract
A work station for photomask inspection includes a microscope and a movable stage positioned below the objective of the microscope. A rectangular frame of the stage surrounds a viewable area of the stage. Rail means are bolted onto the frame at spaced apart positions corresponding to the width of the photomask that is to be inspected so as to position the photomask therebetween. The rails have end stops that are positionable according to the length of the photomask for positioning the end edges of the photomask therebetween.