The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 1985
Filed:
Nov. 21, 1983
Applicant:
Inventor:
Josef J Buschor, San Jose, CA (US);
Assignee:
Five X Corporation, Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B66C / ;
U.S. Cl.
CPC ...
414728 ; 294116 ; 414-8 ; 414735 ;
Abstract
A workpiece positioning mechanism (10, FIG. 1) includes a movable arm (12) having a plurality of joints (14). A pair of grippers (26 and 28) are movable toward and away from a semiconductor wafer boat (44). The grippers are held in position by a stop member (70, FIG. 4) when they engage the boat (44) and locked in an open position by prongs (86). A solenoid (30) is actuated to allow the grippers to move between their open and closed positions. Flexible bellows (22 and 94) and tubing (24) surround moving parts (e.g., 14, 62, 64, 66, 80) of the mechanism (10) to prevent contamination of the semiconductor wafers (52).