The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 1985
Filed:
Jul. 16, 1984
Applicant:
Inventors:
William J Minford, Lehigh Township, Northampton County, PA (US);
Edmond J Murphy, Bethlehem, PA (US);
Trudie C Rice, North Whitehall Township, Lehigh County, PA (US);
Assignee:
AT&T Bell Laboratories, Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; B44C / ; C03C / ; C03C / ;
U.S. Cl.
CPC ...
156664 ; 2956 / ; 156656 ; 1566591 ; 350 9612 ;
Abstract
The specification describes a technique for etching titanium using EDTA compounds. It is especially useful for selective etch processes such as those used to form titanium diffused waveguides in lithium niobate crystals.