The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 1985
Filed:
Aug. 06, 1984
Applicant:
Inventor:
Kenji Murakami, Yokohama, JP;
Assignee:
Tokyo Shibaura Denki Kabushiki Kaisha, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
357 50 ; 357 2311 ; 357 55 ;
Abstract
A semiconductor integrated circuit includes pouch-shaped (in sectional view) isolation regions made of dielectric material consisting of boron and phosphor doped silicate glass. A circuit component is formed in an active region surrounded by adjacent isolation regions. Each pouch-shaped (in sectional view) isolation region is made using an anisotropic etchant and an isotropic etchant successively. There is a method for manufacturing the above device with high integration density and high operating speed.