The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 1985

Filed:

Aug. 31, 1983
Applicant:
Inventors:

Hiroyuki Moriguchi, Koufu, JP;

Masanori Matsumoto, Hachioji, JP;

Akira Nishiwaki, Hachioji, JP;

Yasuo Morohoshi, Hachioji, JP;

Hiroyuki Nomori, Hachioji, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C22C / ;
U.S. Cl.
CPC ...
420590 ; 427 76 ; 420579 ;
Abstract

An evaporation source designed so that two or more materials to be evaporated are heated to evaporate by respective heaters, as well as method of using such an evaporation source are disclosed. The evaporation source further includes means for detecting the temperature of the slowly evaporating material and means for controlling the heaters on the basis of the detected temperature. The method of using this evaporation source comprises controlling the temperature of the slowly evaporating material in order to control the temperature of the evaporation source in such a manner that the respective materials are simultaneously heated to evaporate and deposit a film on a substrate.


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