The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 1985
Filed:
Jul. 19, 1982
Gunter Reich, Cologne, DE;
Leybold-Heraeus GmbH, Cologne, DE;
Abstract
A turbomolecular pump for counterflow leakage tests and the method of its use arranges two, tandem turbomolecular pump stages for pumping toward each other and connects opposite ends of the tandem pump stages respectively to a container or test tank through which a test gas is provided when there is a leak and a detector for detecting the test gas. A connection between the tandem pump stages connects to a forepump for assisting the turbomolecular pump. Arranging the turbomolecular pump in this way permits different pressures in the container or test tank and detector, as is often desired when, for example, the detector is a mass spectrometer, without partition and conduit arrangements therefor.