The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 1985
Filed:
Dec. 20, 1984
Applicant:
Inventors:
Suresh Chandra, Falls Church, VA (US);
Robert S Rohde, Alexandria, VA (US);
Assignee:
The United States of America as represented by the Secretary of the Army, Washington, DC (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356358 ; 356363 ;
Abstract
A multiple reflections interferometer (MRI) which eliminates the normal angle of incidence requirement of other interferometers, such as the standard Michelson interferometer (SMI), and allows convenient choices of interferometric sensitivities, such as exactly 100 nanometers per cycle or 10 nanometers per cycle using a helium-neon laser. The MRI has the mirror that usually receives the normal incidence beam replaced by a two-mirror wedge produce multiple reflections therein to provide greater displacement sensitivities.