The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 1985
Filed:
May. 09, 1980
Applicant:
Inventors:
Exxon Research and Engineering Co, Florham Park, NJ (US);
J Thomas Tiedje, Garwood, NJ (US);
Don L Morel, Watchung, NJ (US);
Benjamin Abeles, Princeton, NJ (US);
Assignee:
Other;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ; H01L / ;
U.S. Cl.
CPC ...
427 39 ; 136258 ; 357-2 ; 357 30 ; 357 15 ; 427 74 ; 427 84 ; 427 86 ;
Abstract
The present invention teaches a combination of parameters for the glow discharge decomposition of silane deposition of an amorphous silicon semiconductor having non-dispersive high mobility transport of majority carriers through the semiconductor material, useful in switching devices such as diodes, transistors and the like.