The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 1985
Filed:
Mar. 15, 1984
Masaru Yamano, Hirakata, JP;
Isao Nagaoka, Hirakata, JP;
Yukinori Kuwano, Katano, JP;
Hiroshi Kawada, Hirakata, JP;
Souichi Sakai, Hirakata, JP;
Sanyo Electric Co., Ltd., , JP;
Abstract
Mutually spaced apart TCO film portions are formed on a glass substrate. An amorphous silicon film of PIN junction type is formed to cover these TCO film portions, and an aluminum film is formed thereon. The aluminum film in the vicinity of the gap between adjacent TCO film portions is removed by means of a laser beam, and the amorphous silicon film is removed by reactive plasma etching using the aluminum film as a mask to thereby expose portions of the TCO film. An aluminum-titanium film is formed over the aluminum film and the exposed portions of the TCO film. The aluminum-titanium film is separated by means of a laser beam to form a plurality of photoelectric converting regions. The photoelectric converting regions thus formed on the glass substrate are connected in series.