The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 1985
Filed:
May. 31, 1983
Applicant:
Inventors:
Hans-Peter Feuerbaum, Munich, DE;
Reinhold Schmitt, Munich, DE;
Assignee:
Siemens Aktiengesellschaft, Berlin & Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250310 ;
Abstract
A method and apparatus suppress a disturbance in the measurement of signals with a particle probe by providing and measuring a known reference voltage on a specimen at at least one time and using the measurement for eliminating the drift phenomena appearing in a measured signal and enables a significant increase in the precision of the measurement of signals. A secondary electron signal which results from a measurement of a reference voltage controls the operating point of a feedback circuit for suppressing the disturbance.