The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 1985
Filed:
Dec. 17, 1982
Tsuneo Fujii, Suita, JP;
Hiroshi Inukai, Takatsuki, JP;
Takayuki Deguchi, Ibaraki, JP;
Toshihiko Amano, Settsu, JP;
Masami Kakuchi, Katsuta, JP;
Hiroshi Asakawa, Mito, JP;
Osamu Kogure, Mito, JP;
Daikin Kogyo Co. Ltd., Osaka, JP;
Nippon Telegraph & Telephone Public Corporation, Tokyo, JP;
Abstract
A resist material of positive type having a high sensitivity, a high resolving power and an excellent adhesion property to substrates, which comprises a copolymer of a fluoroalkyl acrylate having the general formula: ##STR1## wherein R.sub.1 is methyl group, ethyl group, a halogen-substituted methyl or ethyl group, a halogen atom or hydrogen atom, R.sub.2 is a bivalent hydrocarbon group having 1 to 6 carbon atoms, and R.sub.f is a fluoroalkyl group having 1 to 15 carbon atoms, with an acrylic comonomer selected from the group consisting of a glycidyl acrylate, an acrylic acid, an acrylamide and an .alpha.-cyanoacrylate.