The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 1985
Filed:
Sep. 02, 1983
James W Overbeck, Hingham, MA (US);
XRL, Inc., Hingham, MA (US);
Abstract
An apparatus for accurately positioning a laser beam on a semiconductor surface, for example for repairing an integrated circuit, has a translational beam positioning apparatus and a galvanometer based beam positioning apparatus. The translational beam positioning apparatus has first and second platform members, the second platform member moving relative to the first platform member and supporting the galvanometer system. The galvanometer beam positioning system thus moves with the second platform member to cover the surface of an integrated circuit on which 'repair' is to be performed. The second platform member further supports an optical system positioned relative to the galvanometer beam positioning system so that a small and uniform spot size can be achieved, at high speed, using small galvanometer mirrors. Thereby, the galvanometer beam positioning system provides high speed movement of a laser beam over a relatively small area and the translational system provides broad, highly accurate, but slower movement of the entire system across the entire integrated circuit. A method for calibrating the galvanometer system employs apparatus for measuring the exact position of the translational system. A comparison of feature measurements using both the translational system and the galvanometer system enables accurate and reliable calibration of the galvanometer system.