The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 1985
Filed:
Dec. 07, 1981
Applicant:
Inventor:
David W Hoffman, Ann Arbor, MI (US);
Assignee:
Ford Motor Company, Dearborn, MI (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
204298 ; 2041 / ;
Abstract
In a tubular bodied cathode of a sputtering magnetron, at least one permanent magnet is mounted so as to produce magnetic field flux lines that lie in planes oriented transverse to the axis of the cathode body, along a predetermined length thereof. Through appropriate biasing, in a partial pressure ionizable gas atmosphere, a plasma is generated that resembles a closed loop tunnel extending along said predetermined length on the outer surface of the cylindrical cathode, as defined by the magnetic field. Relative rotation between the cathode and the magnetic field provides for even erosion of sputtering material from the surface of the cathode.