Liquid crystal display matrix including a non-linear device

Abstract

An active matrix liquid crystal display device wherein individual display elements are controlled by non-linear devices and methods of fabricating the display devices are provided. The non-linear devices are metal-insulator-metal structures (MIM). Two MIM elements are coupled in parallel to each other and connected to each display element in series. The MIM element includes a metallic thin film of Ta or nitrogen doped Ta and an oxide film formed by anodizing the metallic thin film and a second metallic thin film. The liquid crystal display matrix is formed by depositing a lower metallic thin film on a transparent substrate, selectively removing the first film, anodizing the surface of the first metallic thin film, depositing a pattern of an upper metallic thin film and selectively removing both the lower metallic thin film and the anodized oxide film at the regions other than where the MIM elements are being formed. The upper metallic thin film is selectively patterned to form an electrode of a display element. The two substrates are then bonded together spaced apart and a liquid crystal material is encapsulated therebetween and polarizers are disposed on the outer surfaces of the substrates for forming the matrix display.