The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 1985
Filed:
Feb. 08, 1984
Applicant:
Inventor:
Eberhard Rossow, Oberkochen, DE;
Assignee:
Carl-Zeiss-Stiftung, Heidenheim/Brenz, Oberkochen, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250311 ; 353 40 ; 353 42 ; 364520 ;
Abstract
The invention contemplates an electron microscope having provision for semi-automatic evaluation of the electron-optical image of the microscope, by superposing a light-optical image on the electron-optical image. For this purpose, an image plane (14) near the microscope column is imaged via two deflection mirrors (23, 25) and by an objective (24) onto the output-image fluorescent screen. A marking device having a light spot or an illuminated measurement diaphragm or the cursor of a digitizer equipped with a light spot is movable in the image plane (14).