The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 1985
Filed:
Dec. 01, 1983
Applicant:
Inventors:
Richard E Tressler, Julian, PA (US);
Joseph Stach, State College, PA (US);
Roger L Baeten, State College, PA (US);
Assignee:
Better Semiconductor Processes (BSP), State College, PA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
F27D / ; F27D / ; F27B / ; F27B / ;
U.S. Cl.
CPC ...
432 11 ; 432 23 ; 432123 ; 432239 ; 432258 ;
Abstract
An improved semiconductor wafer handling system completely eliminates the need for boats, sleds, paddles, wheeled carriers, etc., customarily employed in transporting wafers during heat processing through the use of a plurality of rigid, polished cantilevered rods having a multiplicity of spaced slots for cooperatively holding wafers in an upright position. The system provides a means for achieving higher production yields of such semiconductor elements by generating fewer contaminating particles and through less exposure to ambient environment.