The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 14, 1985

Filed:

Feb. 21, 1984
Applicant:
Inventor:

Angus P Andrews, Westlake Village, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
310331 ; 310321 ; 310365 ; 310311 ; 333186 ;
Abstract

The device is made by growing thin-film layers of materials on a silicon strate. These layers are then removed selectively by photolitographic masking and etching, to produce a pattern which is a series of cantilever plates which are piezoelectrically coupled. An electrical signal connected to a first pattern of piezoelectric material will cause the associated plate to deflect. A second piezoelectric pattern on each plate will generate an electrical signal due to the strain caused by deflection of the plate, and this signal is transferred to a first piezoelectric pattern on the next plate, and so on down to the last plate where the signal is extracted.


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