The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 1985
Filed:
Jul. 25, 1983
Applicant:
Inventor:
Shigehiro Minezaki, Ikoma, JP;
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; C23F / ; B44C / ; C03C / ;
U.S. Cl.
CPC ...
1566591 ; 29591 ; 156656 ; 204 42 ; 204 383 ; 427 88 ; 357-4 ; 357 11 ; 430313 ; 430318 ;
Abstract
A thin film transistor is disclosed which has an insulator substrate, a gate electrode, a semiconductor layer and a source/drain electrode disposed on the insulator substrate. The source/drain electrode is patterned through a combination of mask deposition technique and photo-lithography technique.