The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 1985
Filed:
Mar. 30, 1984
Alfred H van Ommen, Eindhoven, NL;
Henricus G Maas, Eindhoven, NL;
Johannes A Appels, Eindhoven, NL;
Wilhelmus J Josquin, Eindhoven, NL;
U.S. Philips Corporation, New York, NY (US);
Abstract
In a method of manufacturing a semiconductor device, ions are implanted into a layer of silicon nitride over a part of its surface, and the layer is then subjected to an etching treatment. According to the present invention, before the etching treatment takes place, but after the ion implantation, the layer is subjected to a heat treatment in which the implanted part of the layer obtains a higher resistance to etching than the non-implanted part. The heat treatment occurs at temperatures above 750.degree. C. Thus, a negative image of a patterned ion irradiation can be formed in the silicon nitride layer. As a result, the number of cases in which an etching or oxidation mask can be formed in a silicon nitride layer without using additional mask is considerably increased.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile